GRGDS
glycine- arginine-glycine-aspartate-serine
PMSQ
polymethylsilsesquioxane
SMC
smooth muscle cell
RESS
rapid expansion of the supercritical solvent
SFD
supercritical fluid deposition
MG
molecular glass
SCORR
supercritical CO2 resist remover
ULK
ultralow dielectric constant
BCP
block copolymer
BATFDPO
2,5-bis[(4-amino-2-trifluoromethylphenoxy)phenyl]diphenylphosphine oxide
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