Friday, September 10, 2010

New 10 terms

SACA
static advancing contact angle

SRCA
static receding contact angle

BARC
bottom antireflective coating

CD
critical dimension

TARC
top antireflective coating

PAB
postapplication bake

EBL
embedded barrier layer

WSA
water shedding agent

SSR
selective segregation removal

IBR
intrinsic birefringence

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