SA
self-assembly
DWA
direct-write assembly
GLD
glancing angle deposition
RTES
alkyltriethoxysilane
RTMS
alkyltrimethoxysilane
HL
holographic lithography
MBIL
multibeam interference lithography
PMIL
phase mask interference lithography
CP
cyclopentanone
GBL
γ-butyrolactone
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