NTRS
National Technology Roadmap for Semiconductors
RC
resistance and capacitance
HDP
high-density plasma
FEOL
front-end-of-the-line
SD
single damascene
DD
dual damascene
RTCVD
room temperature chemical vapor deposition
FTAS
fluorotrialkoxysilane
HPDEC
high power decoupled
FRES
forward recoil elastic scattering
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