FDLC
fluorinated diamond-like carbon
4MS
tetramethylsilane
3MS
trimethylsilane
DMPS
dimethylphenylsilane
DPMS
diphenylmethylsilane
DVDMS
divinyldimethylsilane
TVMS
trivinylmethylsilan
HMCTSO
hexamethylcyclotrisiloxane
TMCTS
tetramethylcyclotetrasiloxane
TVTMCTS
tetravinyltetramethylcyclotetrasiloxane
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