BMO
butadiene monoxide
EP
ellipsometric porosimetry
TEFS
triethoxyfluorosilane
DFL
dielectric flash layer
TMSNB
trimethoxysilylnorbornene
TESNB
triethoxysilylnorbornene
TCS
tetra(trimethoxysilylethyl)cyclotetrasiloxane
ILD
interlayer dielectric
OPL
organic planarization layer
PSZ
pure silica zeolite
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