WIW
within-wafer
PMOS
p-type metal oxide semiconductor
NMOS
n-type metal oxide semiconductor
BPSG
borophosphosilicate glass
BPTEOS
borophosphorous tetraethylorthosilicate
LDIMS
laser desorption ionization mass spectrum
SAMT
self-assembled multilayer
PTAA
polytriarylamine
SC
semiconductor
GD
gate dielectric
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