New 10 terms

WIW
within-wafer

PMOS
p-type metal oxide semiconductor

NMOS
n-type metal oxide semiconductor

BPSG
borophosphosilicate glass

BPTEOS
borophosphorous tetraethylorthosilicate

LDIMS
laser desorption ionization mass spectrum

SAMT
self-assembled multilayer

PTAA
polytriarylamine

SC
semiconductor

GD
gate dielectric

New 10 terms

MOL
middle of the line

STI
shallow trench isolation

ILD
interlevel dielectric

UTSOI
ultrathin silicon-on-insulator

ETSOI
extremely thin silicon-on-insulator

LSOI
local silicon-on-insulator

RMG
replacement metal gate

MuGFET
multigate field effect transistor

LPCVD
low-pressure chemical vapor deposition

WID
within-die

New 10 terms

SSL
strong segmentation limit

PEB
poly(ethylene-co-butadiene)

NDP
nonadecylphenol

MSA
methanesulfonic acid

PDP
pentadecylphenol

NR
neutron reflectivity

SLD
scattering length density

DSA
directed self-assembly

IRS
intermediate segmentation region

LWR
line width roughness

New 10 terms

ITRS
International Technology Roadmap for Semiconductors

TBTDET
terbutylimidotris(diethylamido)tantalum

SMFD
synchronously modulated flow and draw

AVDP
alternating vapor deposition polymerization

VDP
vapor deposition polymerization

TC
terephthaloyl chloride

PD
p-phenylenediamine

GO
graphite oxide

ARPES
angle-resolved photoemission spectroscopy

WSL
weak segmentation limit

New 10 terms

CDO
carbon-doped oxide

BTESM
bis(triethoxysilyl)methane

BTESE
1,2-bis(triethoxysilyl)ethane

HBPCSO
hyperbranched polycarbosilane

MB
methane-bridged

SEI
Science and Engineering Indicators

ACWA
Assembled Chemical Weapons Alternatives

EWG
Environmental Working Group

PTEC
Physics Teacher Education Coalition Conference

CTEC
Chemistry Teacher Education Coalition

New 10 terms

BMO
butadiene monoxide

EP
ellipsometric porosimetry

TEFS
triethoxyfluorosilane

DFL
dielectric flash layer

TMSNB
trimethoxysilylnorbornene

TESNB
triethoxysilylnorbornene

TCS
tetra(trimethoxysilylethyl)cyclotetrasiloxane

ILD
interlayer dielectric

OPL
organic planarization layer

PSZ
pure silica zeolite

New 10 terms

DMTA
mechanical thermal analysis

MELT
modified edge lift-off test

BTESP
1,2-bis(trialkoxysilyl)ethane

FPB
four-point bending

DCB
double cantilever beam

HBCSO
hyperbranched carbosiloxane

HBPCS
hyperbranched polycarbosilane

USHC
unsaturated hydrocarbon

BCHD
bicyclohexadiene

CPO
cyclopentene oxide